X射线源广泛运用于医学成像和放疗，工业检测、安全检查等领域，纳米冷阴极平板X射线源利用大面积冷阴极阵列发射电子轰击大面积透射阳极发光，可实现大量的纳米冷阴极X射线源集成，相比传统单焦斑X射线源可以显著减轻阳极的热负担。作为一种新型器件，纳米冷阴极平板X射线源的成像特性亟待深入研究。
X-ray sources are widely used in medical imaging and radiotherapy, industrial testing, safety inspection and other fields, nano cold cathode flat plate X-ray sources use large-area cold cathode array to emit electrons to bombard large-area transmitted anode luminescence, which can realize the integration of a large number of nano cold cathode X-ray sources, and can significantly reduce the thermal burden of the anode compared with the traditional single-focus X-ray source. As a new type of device, the imaging characteristics of nano-cold cathode flat plate X-ray sources need to be studied urgently.

本论文针对ZnO纳米线冷阴极X射线源及其成像特性，研究ZnO纳米线冷阴极X射线源的制备及其器件特性，研究成像几何特性和束光器对纳米冷阴极平板X射线源成像特性的影响。本论文的主要研究结果概述如下：
In this paper, we studied the preparation of ZnO nanowire cold cathode X-ray sources and their device characteristics, and studied the effects of imaging geometry and beam on the imaging characteristics of nano-cold cathode plate X-ray sources. The main findings of this paper are summarized below:

1.制备了2.7英寸二极结构ZnO纳米线冷阴极平板X射线源，器件的开启电压为17kV，在33kV的阳极电压下，器件的最大电流为1.2mA，X射线的最大剂量率121μGy/s。
1. A 2.7-inch two-pole ZnO nanowire cold cathode flat plate X-ray source was prepared, the opening voltage of the device was 17kV, the maximum current of the device was 1.2mA, and the maximum dose rate of X-ray was 121μGy/s under the anode voltage of 33kV.

2.研究了源与物体之间距离以及物体与探测器之间的距离对纳米冷阴极平板X射线源成像特性的影响。发现源与物体之间的距离越大，X射线源成像的分辨率越高，但探测器接收到的光子数越少，成像结果包含的信息越少。当源与物体之间的距离为55cm时，X射线源的成像分辨率可达到3.15lp/mm。而物体与探测器之间的距离为0cm时成像结果最好，当物体与探测器之间距离逐渐增大时，成像结果变得越来越模糊，无法获得有效的成像。
2. The effects of the distance between the source and the object and the distance between the object and the detector on the imaging characteristics of the nano-cold cathode plate X-ray source were studied. The greater the distance between the found source and the object, the higher the resolution of the X-ray source image, but the smaller the number of photons received by the detector, the less information the imaging result contains. When the distance between the source and the object is 55 cm, the imaging resolution of the X-ray source can reach 3.15 lp/mm. However, when the distance between the object and the detector is 0cm, the imaging results are the best, and when the distance between the object and the detector gradually increases, the imaging results become more and more blurry, and effective imaging cannot be obtained.

3.研究了束光器对纳米冷阴极平板X射线源成像特性的影响，发现束光器对提升平板X射线源成像的分辨率有一定作用，但束光器对X射线约束过度时，平板X射线源成像的分辨率反而有所下降。
3. The effect of the beam on the imaging characteristics of the nano cold cathode plate X-ray source was studied, and it was found that the beam had a certain effect on improving the resolution of the plate X-ray source imaging, but the resolution of the plate X-ray source imaging decreased when the beam was overly constrained on the X-rays.