1.1.1 Hybrid glass/teflon/stainless steel construction for maximum purity with corrosion resistance which is best suited for use in a research /special fibre production environment. The cabinet housing the stainless steel pipework, valves, MFCs, controls and drybox with bubblers and teflon components is segregated into zones and has as small a footprint as is practical. Connections for gases and power are on the top of the cabinet. 1.1.1 混合玻璃/聚四氟乙烯/不锈钢结构可实现最大纯度和耐腐蚀性,最适合在研究/特种纤维生产环境中使用。装有不锈钢管道、阀门、MFC、控制器和干燥箱(带起泡器和聚四氟乙烯组件)的柜子被分成多个区域,并且占地面积尽可能小。气体和电源的连接位于机柜顶部。
1.1.2 Bubblers 1.1.2 起泡器
3 bubbler channels for SiCl 4 (10 litre), GeCl 4 ( 5 litre), POCl 3 ( 1 litre). The bubblers are of borosilicate glass construction and in conjunction with the transparent oil bath allow the liquid level to be visually monitored at all times by the operator. 3 个起泡器通道,用于 SiCl 4 (10 升)、GeCl 4 (5 升)、POCl 3 (1 升)。 起泡器采用硼硅酸盐玻璃结构,与透明油浴相结合,使操作员可以随时目视监控液位。
The bubblers are designed to ensure complete saturation of the bubbler gas by having a large surface area sintered glass frit located at the bottom of the bubbler to generate a large number of small bubbles to maximise the surface area of the gas exposed to the liquid. Additionally the elongated shape of the bubblers ensures that the transit time for the gas to be exposed to the liquid is maximised. 起泡器的设计是为了确保起泡器气体的完全饱和,通过在起泡器底部放置大表面积的烧结玻璃料来产生大量的小气泡,从而使起泡器的表面积最大化。气体暴露于液体中。此外,起泡器的细长形状确保了气体暴露于液体的传输时间最大化。
The shape also enhances turbulent mixing to enhance temperature uniformity of the liquid whilst ensuring the path length for thermal transfer from the surrounding oil layer is minimised. 该形状还增强了湍流混合,以提高液体的温度均匀性,同时确保从周围油层进行热传递的路径长度最小化。
Each bubbler is fitted with manual isolation valves. These valves do not require opening/closing during normal operation of the machine. 每个起泡器都配有手动隔离阀。这些阀门在机器正常运行期间不需要打开/关闭。
1.1.3 Oil Bath 1.1.3 油浴
Oil Bath for bubblers - All three bubblers are housed in a single temperature controlled oil bath allowing set points in the range deg C with accuracy of at least 0.1 deg C after temperature equilibration. The oil bath has a transparent front window for viewing the reagent level in each bubbler. A resistance thermometer mounted in the oil bath and the MCVD PLC 起泡器油浴 - 所有三个起泡器均安装在单个温控油浴中,允许设定点在 摄氏度范围内,温度平衡后精度至少为 0.1 摄氏度。油浴有一个透明的前窗,用于观察每个起泡器中的试剂液位。安装在油浴中的电阻温度计和 MCVD PLC
control system provides PID controls to drive the bath heater, giving a temperature display and provide the ability to use out of limit alarms. This heater works in opposition to a chiller unit which are situated with the heater circulating pump and oil reservoir in the frame. For operation in the range it is recommended that the drybox chiller option is purchased to provide optimum temperature control in this range in which case temperature control to better than is maintained over the entire operating range of the system. A drybox chiller is not included unless specifically stated as being included and can be purchased as an option item at additional cost if required. 控制系统提供 PID 控制来驱动浴加热器,提供温度显示并提供使用超限警报的能力。该加热器与冷却装置相对工作,冷却装置与加热器循环泵和油箱一起位于框架中。对于 范围内的操作,建议购买干箱冷却器选件,以在此范围内提供最佳温度控制,在这种情况下,温度控制优于
1.1.4 Elevated Temperature N2 Purged Dry Box 1.1.4 高温氮气吹扫干燥箱
This unit encloses the "wetted" pipework/valves and the bubblers and is constructed using folded 316 stainless steel box with painted exterior. The front window is of toughened glass construction with a high integrity flange seal which in conjunction with the steel box ensures adequate containment in the extremely unlikely event of a chemical leakage. The window is designed to be lifted out, so providing access to the dry box interior for major maintenance and inspection operations. More limited access without window removal is possible via three glove ports. These allow access to the bubbler valves and fittings without breaching the leak integrity of the Dry/Hot Box. 该装置封闭了“湿式”管道/阀门和起泡器,并使用外部涂漆的折叠 316 不锈钢箱构造而成。前窗采用钢化玻璃结构,具有高度完整性的法兰密封件,与钢盒相结合,可确保在极不可能发生的化学泄漏事件中得到足够的密封。该窗户设计为可升出,因此可以进入干燥箱内部进行重大维护和检查操作。通过三个手套口可以在不拆除窗户的情况下进行更有限的访问。这些允许接触起泡器阀门和配件,而不会破坏干/热箱的泄漏完整性。
The Dry/Hot Box houses the oil bath is containing the borosilicate glass bubblers and all the valving, pipework and mixing manifolds. A nitrogen purge is supplied to this unit from the customer's supply and with an appropriately pure supply (i.e. typically liquid source) and a continuous low flow purge is maintained with a bleed to vent via a relief valve. 干/热箱内装有油浴,其中包含硼硅酸盐玻璃起泡器以及所有阀门、管道和混合歧管。从客户的供应和适当纯净的供应(即通常是液体源)向该装置提供氮气吹扫,并通过安全阀排气来维持连续的低流量吹扫。
Drybox Emergency Ventilation -The drybox also includes a large bore emergency extract port which is connected to the customer extract system and a manual valve can be opened in the unlikely event that the end user needs to connect extract to the drybox. 干燥箱紧急通风 - 干燥箱还包括一个大口径紧急抽气端口,该端口连接到客户抽气系统,并且在最终用户需要将抽气连接到干燥箱的不太可能的情况下,可以打开手动阀。
The nitrogen inside the dry/hot box is thermostatically controlled allowing the bubblers to operate at elevated temperatures without recondensation of halide vapour in the downstream pipework. Regulation of the dry box heater is by PID control provided by the main MCVD PLC control system. 干/热箱内的氮气是恒温控制的,允许起泡器在高温下运行,而卤化物蒸气不会在下游管道中再冷凝。干燥箱加热器的调节是通过主 MCVD PLC 控制系统提供的 PID 控制实现的。
1.1.5 Digital MFCs are used for precise flow control. 1.1.5 数字MFC用于精确的流量控制。
1.1.6 Gas channels as follows (mfc flow ranges to be confirmed and are one mfc per channel unless otherwise specified. MFCs are normally closed type. MFC flow ranges can be mutually agreed or we can suggest typical values if required. 1.1.6 气体通道如下(MFC 流量范围待确认,除非另有说明,每个通道一个 MFC。MFC 为常闭型。MFC 流量范围可以双方商定,或者如果需要,我们可以建议典型值。
Gas channels as follows (mfc flow ranges are to be agreed): 气体通道如下(mfc流量范围需商定):
O2 carrier 氧气载体
O 2 (SiCl4 High) O 2 (SiCl4 高)
O 2 (SiCl4 Low) O 2 (SiCl4 低)
O 2 ( GeCl 4 High) O 2 (GeCl 4 高)
O 2 ( GeCl 4 Low) O 2 (GeCl 4 低)
O 2 (POCl3 High) O 2 (POCl3 高)
O 2 (POCl3 Low) O 2 (POCl3 低)
SF6 (High) SF6(高)
SF6 (Low) SF6(低)
N 2 氮2
He 他
Cl 2 (With N 2 purge facility) Cl 2 (带 N 2 吹扫设施)
SiF4 (With N2 purge facility) SiF4(带氮气吹扫装置)
BCl 3 High (Heated lines and with N2 Purge Facility) BCl 3 High(加热管线和 N2 吹扫设施)
BCI3 Low (Heated lines and with N2 Purge Facility) BCI3 低(加热管线和 N2 吹扫设施)
The non-bubbler channels are switched by pneumatic bellows valves on the MFC gas panel. All these gases are provided with an on/off function downstream of the MFC. Corrosive toxic gas channels such as chlorine are equipped with local nitrogen/gas switching upstream and run/vent switching downstream of the MFC. Check valves are provided where necessary to ensure no back-streaming occurs of corrosive/toxic reagent gases into carrier gas lines. 非起泡器通道通过 MFC 气体面板上的气动波纹管阀进行切换。所有这些气体在 MFC 下游都具有开/关功能。氯气等腐蚀性有毒气体通道上游配备有本地氮气/气体切换装置,MFC 下游配备有运行/通风切换装置。必要时提供止回阀,以确保腐蚀性/有毒反应气体不会回流到载气管线中。
Valving and connections are provided for gas flow sampling of all channels for volumetric 提供阀门和连接,用于所有通道的气流采样,以进行体积测量
flow calibration. 流量校准。
1.1.7 Gas system pipework/valves are 316 stainless steel. Drybox pipework/valves which are "wetted" by vapour are teflon/FEP. Bubblers are borosilicate. 1.1.7 燃气系统管道/阀门采用316不锈钢。被 蒸汽“润湿”的干燥箱管道/阀门是聚四氟乙烯/FEP。起泡器是硼硅酸盐的。
1.1.8 Separate BCl 3 teflon run/vent valve manifolding in the drybox. 1.1.8 干燥箱中独立的 BCl 3 聚四氟乙烯运行/排气阀歧管。
1.1.9 All gas lines are fitted with manual isolation valves and inlet particle filters of 0.1 micron or better. 1.1.9 所有气体管线均配备手动隔离阀和0.1微米或更好的入口颗粒过滤器。
1.1.10` The cabinet housing the stainless steel pipework, valves and MFCs is ventilated by connecting a spigot located at the top of the cabinet to the Buyer's factory extract system to ensure the cabinet remains under slight negative pressure. 1.1.10` 装有不锈钢管道、阀门和 MFC 的机柜通过将机柜顶部的插口连接到买方工厂抽气系统进行通风,以确保机柜保持轻微负压。
1.1.11 Bubbler refilling manifolding and pipework. The bubblers for , and POCl 3 are fitted with manifolding and pipework to allow automatic bubbler filling (requires SGC bulk 1.1.11 起泡器充注歧管和管道。 和 POCl 3 的起泡器配有歧管和管道系统,以允许自动起泡器填充(需要 SGC 散装
store and bubbler refilling system to be purchased and this is not included unless specifically shown in the pricing. An MCVD operator interface screen is provided to allow manual control of valves in the MCVD system related to bubbler filling for users who wish to supply their own bubbler filling system) 商店和起泡器再填充系统需要购买,除非定价中特别注明,否则不包括在内。提供 MCVD 操作员界面屏幕,以便为希望提供自己的起泡器灌装系统的用户手动控制 MCVD 系统中与起泡器灌装相关的阀门)
1.1.12 Pneumatics for Gas System 1.1.12 气体系统气动
The gas inlet for pneumatics is fitted with a local regulator with integral filter. Additionally pneumatics pressure is monitored by a low pressure switch and should it fall below a preset level an alarm is sounded and event logged. Valves can also be operated directly from the valve terminal or through test screens provided on the operator interface. Unauthorised access to direct manual actuation of valves is prevented by lockable doors on the MCVD control bay housing the valve terminal panel and by password protection on test screens. 气动装置的进气口配有带有集成过滤器的本地调节器。此外,气动压力由低压开关监控,如果压力低于预设水平,则会发出警报并记录事件。还可以直接从阀岛或通过操作员界面上提供的测试屏幕操作阀门。通过装有阀岛面板的 MCVD 控制室上的可锁门以及测试屏幕上的密码保护,可以防止未经授权直接手动启动阀门。
1.1.13 Port for MFC Flow Checking 1.1.13 MFC流量检查接口
A pipe loop is provided which when broken allows MFC flows to be directed to the Buyers flow checking equipment. Note N2 only should be used for flow checking MFCs and the appropriate correction factor then applied to the reading. 提供了一个管道环路,当管道环路破裂时,MFC 流将被引导至买方的流量检查设备。注意 N2 只能用于流量检查 MFC,然后将适当的校正系数应用于读数。
1.1.14 N2 purges for the rotary seal, pressure transducer, vent manifolds and lathe line purge utilise rotoflow (ie ball in tube) type flow meters. 1.1.14 用于旋转密封件、压力传感器、排气歧管和车床线吹扫的 N2 吹扫采用 Rotoflow(即管中球)型流量计。
1.2 MCVD Lathe comprising: 1.2 MCVD车床包括:
- 1.2.1 Bed Length - 1.2.1 床身长度
Lathe with extended bed length giving 2100 mm between heat shields 床身长度加长的车床,隔热罩之间的距离为 2100 毫米
1.2.2 Motor Drive Systems for Burner Carriage, Chuck Rotation and Driven Tailstock Precision drive systems with encoder feedback for main burner carriage, tailstock and chuck rotation. For process operation burner carriage speeds may be programmed up to the same speed as is used for fast traverse ie . 1.2.2 用于燃烧器托架、卡盘旋转和驱动尾座的电机驱动系统 带编码器反馈的精密驱动系统,用于主燃烧器托架、尾座和卡盘旋转。对于过程操作,燃烧器托架速度可被编程至与用于快速移动的速度相同的速度,即 。
The burner carriage is interlocked with limit switches to prevent collision with the headstock and tailstock heat shields. 燃烧器托架与限位开关联锁,以防止与主轴箱和尾座隔热罩碰撞。
The burner carriage may be operated in both forward and reverse directions during process. 燃烧器托架在加工过程中可以向前和向后两个方向操作。
Chuck rotation speeds 0-100 rpm. Direction of chuck rotation is settable via the operator interface. The chuck rotation drive allows the tube to be indexed to known angle for static processing such as etching a longitudinal stripe. 卡盘转速 0-100 rpm。卡盘旋转方向可通过操作员界面设置。卡盘旋转驱动器允许将管转位至已知角度以进行静态处理,例如蚀刻纵向条纹。
- 1.2.3 Tailstock - 1.2.3 尾座
The tailstock has a bidirectional drive to allow preform stretching/squashing operations. Fitted with supplementary drive disengage clutch and tailstock hand wheel to allow glass working to be 尾座具有双向驱动装置,可进行瓶坯拉伸/挤压操作。配有辅助传动分离离合器和尾座手轮,使玻璃加工更加轻松
carried out in the conventional way. Speed range . The driven tailstock is interlocked with limit switches to prevent over travel or collision with the main burner carriage. 以常规方式进行。速度范围 。从动尾座与限位开关互锁,以防止超程或与主燃烧器托架碰撞。
- 1.2.4 Chucks - 1.2.4 卡盘
Three jaw single chucks through bore of 52 mm and can clamp onto tubes/rods as small as 10 mm diameter. Chuck rotation speeds 0-100 rpm. Direction of chuck rotation is settable via the operator interface. Chucks are mechanically synchronised by a splined shaft arrangement. 三爪单卡盘通孔为 52 毫米,可夹紧直径小至 10 毫米的管/棒。卡盘转速 0-100 rpm。卡盘旋转方向可通过操作员界面设置。卡盘通过花键轴装置实现机械同步。
1.2.5 Chuck Heat Shields 1.2.5 卡盘隔热罩
Chucks are protected with stainless steel heat shields with interchangeable inserts sized according to glass tube diameter. One set of inserts to an agreed size included as standard. 卡盘受到不锈钢隔热罩的保护,其可互换的嵌件尺寸根据玻璃管直径而定。标准包含一套符合商定尺寸的刀片。
1.2.6 Main Burner 1.2.6 主燃烧器
Main Burner is a "half ring" water cooled stainless steel matrix burner with N2 gas curtains for flame profile adjustment. The burner is designed and manufactured by SGC. N2 curtain flow (total for both curtains) can be set in the range and is controlled by a single rotoflow (ball in tube) type flow meter. Burner fuel gases are with digital MFCs. The burner is fitted with low water flow auto shut off system. Burner MFC flow range 200 sim H 2 and 100 slm O2. 主燃烧器是一个“半环”水冷不锈钢基质燃烧器,带有用于火焰剖面调节的氮气幕。该燃烧器由SGC设计和制造。 N2 帘流(两个帘幕的总流量)可在 范围内设置,并由单个 Rotoflow(管中球)型流量计控制。燃烧器燃气 采用数字MFC。燃烧器配有低水流自动关闭系统。燃烧器 MFC 流量范围为 200 sim H 2 和 100 slm O2。
1.2.7 Main Burner Pipework 1.2.7 主燃烧器管道
The main burner gas circuit pipework and fittings are appropriate for the flow and application. Flame arrestors are provided where necessary. 主燃烧器燃气回路管道和配件适合流量和应用。必要时提供阻火器。
1.2.8 Main Burner N2 Purging 1.2.8 主燃烧器氮气吹扫
The burner gas circuit provides automatic N 2 purging of the H 2 line on burner shutoff. 燃烧器气体回路在燃烧器关闭时提供对 H 2 管线的自动 N 2 吹扫。
1.2.9 Nitrogen Supply to Lathe 1.2.9 车床氮气供给
Nitrogen pipework will be supplied to the lathe for the N 2 burner wings and for other purging operations such as the pyrometer. 氮气管道将供应至车床,用于 N 2 燃烧器翼和其他吹扫操作,例如高温计。
1.2.10 Loss of Cooling Water Interlock 1.2.10 冷却水损失联锁
An interlocked water flow switch is provided such that in the event of insufficient or complete cooling water failure the main burner will be automatically extinguished, the process switched to a safe state and an alarm sounded. 设有联锁水流开关,在冷却水不足或完全失效的情况下,主燃烧器将自动熄灭,过程切换到安全状态并发出警报。
1.2.11 Lathe Carriage Control 1.2.11 车床行走控制
The lathe carriage is controlled by a precision motor with encoder control linked to the PLC. Carriage motion is both under recipe control and also can be moved locally by joystick. 车床托架由精密电机控制,编码器控制连接到 PLC。托架运动既受配方控制,也可以通过操纵杆进行本地移动。
1.2.12 No Flame Detection 1.2.12 无火焰检测
An Interlocked "No flame" detection system for the main burner. The flame detection system will automatically cut off the fuel gases in the event of a flame out condition being detected and an alarm will alert the operator and the event is datalogged. In order to allow lighting of the burner pilot the control system will permit burner pilot flow gases to flow for a short period after which the gases will be cut off if no flame is detected. Furthermore if a process was running and a flame out occurred the MCVD system would automatically switch to the idle state. 主燃烧器的联锁“无火焰”检测系统。如果检测到熄火情况,火焰检测系统将自动切断燃气,并向操作员发出警报,并记录该事件。为了允许燃烧器引燃器点燃,控制系统将允许燃烧器引燃器气体流动一小段时间,之后如果没有检测到火焰,则气体将被切断。此外,如果工艺正在运行并且发生熄火,MCVD 系统将自动切换到空闲状态。
1.2.13 Rear (Tailstock) Burner 1.2.13 后(尾座)燃烧器
A rear (Tailstock) pilot jet burner with a needle valve for flow control is provided for heating the joint between the preform substrate tube and the soot trap. A manual isolation valve is provided after the needle valve. The position of the tailstock jet is adjustable to allow for run to run variations in joint position. Flow range is . Pipework uses high quality pipe and fittings. 后部(尾座)引燃喷射燃烧器 带有用于流量控制的针阀,用于加热预制件基管和烟灰捕集器之间的接头。针阀后设有手动隔离阀。尾座喷嘴的位置可调节,以允许运行时关节位置的变化。流量范围为 。管道采用优质管材和管件。
1.2.14 Front (Headstock) Burner 1.2.14 前(床头)燃烧器
A front (headstock) pilot jet burner (H2) with a needle valve for flow control is provided for heating near the headstock handle joint. A manual isolation valve is provided after the needle valve. The position of the tailstock jet is adjustable to allow for run to run variations in joint position. Flow range is slm H 2 . Pipework uses high quality pipe and fittings. 配有用于流量控制的针阀的前(车头)引燃喷射燃烧器 (H2),用于在车头手柄接头附近进行加热。针阀后设有手动隔离阀。尾座喷嘴的位置可调节,以允许运行时关节位置的变化。流量范围为 slm H 2 。管道采用优质管材和管件。
1.2.15 Hand Torch 1.2.15 手电筒
Pressure regulation and manifolding is provided for a hand torch and a hand torch is included in the scope of supply. The lines include flame arrester. Flexible pipework connections are retained by appropriate non reusable clips. 为手持式割炬提供压力调节和歧管,手持式割炬包含在供货范围内。该管线包括阻火器。柔性管道连接由适当的不可重复使用的夹子固定。
1.2.16 Pneumatics for Lathe 1.2.16 车床气动装置
The gas inlet for lathe pneumatics is fitted with a local regulator with integral filter. Additionally pneumatics pressure is monitored by a low pressure switch and should it fall below a preset level an alarm is sounded and event logged. Valves can also be operated directly from the valve terminal or through test screens provided on the operator interface. Unauthorised access to direct manual actuation of valves is prevented by lockable doors on the lathe base area housing the valve terminal panel and by password protection on test screens. 车床气动装置的进气口配有带集成过滤器的本地调节器。此外,气动压力由低压开关监控,如果压力低于预设水平,则会发出警报并记录事件。还可以直接从阀岛或通过操作员界面上提供的测试屏幕操作阀门。通过装有阀岛面板的车床底座区域上的可锁门以及测试屏幕上的密码保护,可以防止未经授权直接手动启动阀门。
1.2.17 Pyrometer 1.2.17 高温计
An IMPACT IN 5/5-L plus pyrometer operating at 5.14 microns is provided in order to measure the temperature of substrate tubes during processing. Temperature range of the pyrometer is 400 -2500 Deg C. 提供运行在 5.14 微米的 IMPACT IN 5/5-L plus 高温计,以便测量加工过程中基管的温度。高温计的温度范围为400℃-2500℃。